• DocumentCode
    2006676
  • Title

    Dielectric layers with gradual properties

  • Author

    Makasheva, Kremena ; Despax, Bernard ; Boudou, Laurent ; Teyssedre, Gilbert ; Ressier, Laurence ; Pons, Patrick

  • Author_Institution
    LAPLACE (Lab. Plasma et Conversion d´´Energie), Univ. de Toulouse, Toulouse, France
  • fYear
    2010
  • fDate
    4-9 July 2010
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    This work presents results from a study of thin dielectric layers organized in a structure that behaves as an unified layer with gradual properties. A better understanding of dielectric charging phenomena is aimed at in order to control the conductive properties of the multi-layer system. We first characterize each mono-layer deposited singly on a substrate before the characterization of our multi-layer system. The presented results are for the material and electrical properties of the layers. They are obtained from different diagnostic methods. It was found that such a concept allows modulation of the conductive properties of dielectric materials.
  • Keywords
    dielectric materials; dielectric properties; dielectric thin films; electrical conductivity; conductive properties; dielectric charging; dielectric materials; dielectric properties; dielectric thin layers; electrical properties; monolayer deposition; Conductivity; Dielectrics; Ellipsometry; Films; Gold; Silicon; Substrates; RF MEMS capacitive switches; diagnostics; dielectric charging; insulating materials;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid Dielectrics (ICSD), 2010 10th IEEE International Conference on
  • Conference_Location
    Potsdam
  • Print_ISBN
    978-1-4244-7945-0
  • Electronic_ISBN
    978-1-4244-7943-6
  • Type

    conf

  • DOI
    10.1109/ICSD.2010.5568260
  • Filename
    5568260