DocumentCode
2006777
Title
Wavelength- and bandwidth-tunable filters based on MEMS-actuated microdisk resonators
Author
Yao, Jin ; Lee, Ming-Chang M. ; Leuenberger, David ; Wu, Ming C.
Author_Institution
Dept. Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
fYear
2006
fDate
5-10 March 2006
Abstract
A wavelength- and bandwidth- tunable filter with microelectromechanical-system (MEMS)-actuated waveguides is first demonstrated on a silicon-based microdisk resonator. Integrated microheaters enabled wavelength tuning up to 125 GHz. Bandwidth can be tuned from 12.0 to 41.2 GHz by coupling control.
Keywords
elemental semiconductors; integrated optics; micro-optics; microactuators; micromechanical resonators; optical communication equipment; optical design techniques; optical filters; optical tuning; optical waveguides; silicon; 12.0 to 41.2 GHz; MEMS-actuated microdisk resonator; Si; bandwidth-tunable filter; coupling control; integrated microheater; wavelength-tunable filter; Bandwidth; Integrated optics; Optical coupling; Optical devices; Optical filters; Optical resonators; Optical tuning; Optical waveguides; Resonator filters; Tunable circuits and devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical Fiber Communication Conference, 2006 and the 2006 National Fiber Optic Engineers Conference. OFC 2006
Print_ISBN
1-55752-803-9
Type
conf
DOI
10.1109/OFC.2006.215420
Filename
1636450
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