• DocumentCode
    2006777
  • Title

    Wavelength- and bandwidth-tunable filters based on MEMS-actuated microdisk resonators

  • Author

    Yao, Jin ; Lee, Ming-Chang M. ; Leuenberger, David ; Wu, Ming C.

  • Author_Institution
    Dept. Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
  • fYear
    2006
  • fDate
    5-10 March 2006
  • Abstract
    A wavelength- and bandwidth- tunable filter with microelectromechanical-system (MEMS)-actuated waveguides is first demonstrated on a silicon-based microdisk resonator. Integrated microheaters enabled wavelength tuning up to 125 GHz. Bandwidth can be tuned from 12.0 to 41.2 GHz by coupling control.
  • Keywords
    elemental semiconductors; integrated optics; micro-optics; microactuators; micromechanical resonators; optical communication equipment; optical design techniques; optical filters; optical tuning; optical waveguides; silicon; 12.0 to 41.2 GHz; MEMS-actuated microdisk resonator; Si; bandwidth-tunable filter; coupling control; integrated microheater; wavelength-tunable filter; Bandwidth; Integrated optics; Optical coupling; Optical devices; Optical filters; Optical resonators; Optical tuning; Optical waveguides; Resonator filters; Tunable circuits and devices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Fiber Communication Conference, 2006 and the 2006 National Fiber Optic Engineers Conference. OFC 2006
  • Print_ISBN
    1-55752-803-9
  • Type

    conf

  • DOI
    10.1109/OFC.2006.215420
  • Filename
    1636450