Title :
Wavelength- and bandwidth-tunable filters based on MEMS-actuated microdisk resonators
Author :
Yao, Jin ; Lee, Ming-Chang M. ; Leuenberger, David ; Wu, Ming C.
Author_Institution :
Dept. Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
Abstract :
A wavelength- and bandwidth- tunable filter with microelectromechanical-system (MEMS)-actuated waveguides is first demonstrated on a silicon-based microdisk resonator. Integrated microheaters enabled wavelength tuning up to 125 GHz. Bandwidth can be tuned from 12.0 to 41.2 GHz by coupling control.
Keywords :
elemental semiconductors; integrated optics; micro-optics; microactuators; micromechanical resonators; optical communication equipment; optical design techniques; optical filters; optical tuning; optical waveguides; silicon; 12.0 to 41.2 GHz; MEMS-actuated microdisk resonator; Si; bandwidth-tunable filter; coupling control; integrated microheater; wavelength-tunable filter; Bandwidth; Integrated optics; Optical coupling; Optical devices; Optical filters; Optical resonators; Optical tuning; Optical waveguides; Resonator filters; Tunable circuits and devices;
Conference_Titel :
Optical Fiber Communication Conference, 2006 and the 2006 National Fiber Optic Engineers Conference. OFC 2006
Print_ISBN :
1-55752-803-9
DOI :
10.1109/OFC.2006.215420
