Design optimization of MEMS 2D scanning mirrors with high resonant frequencies

Author

Ma, Wei ; Chan, Ho-Yin ; Wong, Chun Cheong ; Chan, Yick Chuen ; Tsai, Chen-Jung ; Lee, Francis Chee Shuen

Author_Institution

Hong Kong Appl. Sci. & Technol. Res. Inst. Co. Ltd., Hong Kong, China

fYear

2010

fDate

24-28 Jan. 2010

Firstpage

823

Lastpage

826

Abstract

An accurate and effective finite element method (FEM) based model for the MEMS electrostatically actuated 2D resonant scanning mirror is presently reported to analyze and predict the mirror´s performance which has highly nonlinearity. The simulated transient responses of the mirror showed good matches with the experimental results. The hysteretic frequency response can also be predicted by the model with +/-10% deviation. Based on the derived model, an optimized mirror design, with elliptical-shaped mirror and extended combs, was implemented and characterized. A 51.1% increase of the scanning angle has been measured using the optimized design.

Keywords

finite element analysis; micromechanical devices; micromirrors; optical design techniques; MEMS electrostatically actuated 2D resonant scanning mirror; elliptical-shaped mirror; extended combs; finite element method; hysteretic frequency response; optimized mirror design; Design optimization; Electrostatic analysis; Finite element methods; Hysteresis; Micromechanical devices; Mirrors; Performance analysis; Predictive models; Resonance; Resonant frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on

Conference_Location

Wanchai, Hong Kong

ISSN

1084-6999

Print_ISBN

978-1-4244-5761-8

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2010.5442279

Filename

5442279