Title :
Design optimization of MEMS 2D scanning mirrors with high resonant frequencies
Author :
Ma, Wei ; Chan, Ho-Yin ; Wong, Chun Cheong ; Chan, Yick Chuen ; Tsai, Chen-Jung ; Lee, Francis Chee Shuen
Author_Institution :
Hong Kong Appl. Sci. & Technol. Res. Inst. Co. Ltd., Hong Kong, China
Abstract :
An accurate and effective finite element method (FEM) based model for the MEMS electrostatically actuated 2D resonant scanning mirror is presently reported to analyze and predict the mirror´s performance which has highly nonlinearity. The simulated transient responses of the mirror showed good matches with the experimental results. The hysteretic frequency response can also be predicted by the model with +/-10% deviation. Based on the derived model, an optimized mirror design, with elliptical-shaped mirror and extended combs, was implemented and characterized. A 51.1% increase of the scanning angle has been measured using the optimized design.
Keywords :
finite element analysis; micromechanical devices; micromirrors; optical design techniques; MEMS electrostatically actuated 2D resonant scanning mirror; elliptical-shaped mirror; extended combs; finite element method; hysteretic frequency response; optimized mirror design; Design optimization; Electrostatic analysis; Finite element methods; Hysteresis; Micromechanical devices; Mirrors; Performance analysis; Predictive models; Resonance; Resonant frequency;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2010.5442279
