Fiber-optic confocal microscope with an electrothermally-actuated, large-tunable-range microlens scanner for depth scanning

Author

Liu, Lin ; Wu, Lei ; Zory, Peter ; Xie, Huikai

Author_Institution

Univ. of Florida, Gainesville, FL, USA

fYear

2010

fDate

24-28 Jan. 2010

Firstpage

827

Lastpage

830

Abstract

We present a fiber-optic reflectance confocal microscope using a large-tunable-range MEMS microlens scanner for automatic axial scan. The tunable microlens is actuated by an electrothermal actuator that is capable of scanning up to 0.9 mm at less than 6.3 V. The lateral shift and tilt of the microlens are about 10 Â¿m and 0.4Â°, respectively. 2-D cross-sectional reflectance confocal images of micro-particles in polymer and rat skin have been obtained with the lateral and axial resolutions of about 1.2 Â¿m and 38 Â¿m, respectively.

Keywords

actuators; fibre optic sensors; microlenses; micromechanical devices; optical microscopes; optical scanners; polymers; MEMS microlens scanner; automatic axial scan; depth scanning; electrothermal actuator; fiber optic reflectance confocal microscope; lateral shift; microparticles; polymer; rat skin; tunable microlens; Actuators; Electrothermal effects; Image resolution; Lenses; Micromechanical devices; Microoptics; Microscopy; Polymers; Reflectivity; Skin;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on

Conference_Location

Wanchai, Hong Kong

ISSN

1084-6999

Print_ISBN

978-1-4244-5761-8

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2010.5442280

Filename

5442280