Title :
CCD based pH imaging sensor
Author :
Mimura, S. ; Sawada, K. ; Tomita, K. ; Nakanishi, T. ; Tanabe, H. ; Ando, T.
Author_Institution :
HORIBA Ltd., Kyoto, Japan
Abstract :
We propose and demonstrate a novel pH imaging sensor based on the CCD (Charge Coupled Device) technology. This device consists of pH sensing parts, which sense pH value and transform a pH value to electric charges, and conventional CCD parts, which transfer the electric charges to read out circuit. A thin Si/sub 3/N/sub 4/ film which acts as the hydrogen ion-sensitive membrane was used in the pH sensing film. The prototype devices were fabricated. The output signal from the imaging sensor was lineally changed from pH0 to 14, and successfully observed a pH image on a black and white TV monitor.
Keywords :
CCD image sensors; chemical sensors; pH measurement; CCD; Si/sub 3/N/sub 4/; Si/sub 3/N/sub 4/ film; hydrogen ion-sensitive membrane; pH imaging sensor; Biomembranes; Charge coupled devices; Charge-coupled image sensors; Circuits; Hydrogen; Image sensors; Monitoring; Prototypes; Semiconductor films; TV;
Conference_Titel :
Electron Devices Meeting, 1997. IEDM '97. Technical Digest., International
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-4100-7
DOI :
10.1109/IEDM.1997.650530
