New H-shape soft tortion spring and its micro mirror application

This paper describes a new H-shape spring, which is soft enough to rotate the mirror but stiff enough to prevent from parallel displacement of the mirror toward the electrode. Four important spring constants can be controlled by adjusting the seven structural parameters of the H-shaped spring. This H-shape spring has a small footprint, which gives us more freedom of device arrangement and device integration. This paper also describes the characteristics of micro-mirror array devices for optical cross connect switches (OXC) that use rotational deformation and wavelength selective switches (WSS) with bending deformation as applications of the H-shape spring.