Title :
New charge pumping method for direct measurement of spatial distribution of fixed charge
Author :
Tsuchiaki, M. ; Momose, H.S. ; Morimoto, T. ; Iwai, H.
Author_Institution :
ULSI Research Center, Toshiba Corporation, Japan
Keywords :
Charge measurement; Charge pumps; Current measurement; Density measurement; Energy measurement; Hot carriers; Interface states; MOSFET circuits; Noise measurement; Stress;
Conference_Titel :
VLSI Technology, 1991. Digest of Technical Papers., 1991 Symposium on
Conference_Location :
Oiso, Japan
DOI :
10.1109/VLSIT.1991.705969