• DocumentCode
    2007268
  • Title

    Tunable micro-fluidic multi-component micro-lens system with integrated actuator

  • Author

    Mader, Daniel ; Marhöfer, Max ; Waibel, Philipp ; Zappe, Hans ; Seifert, Andreas

  • Author_Institution
    Dept. of Microsyst. Eng. (IMTEK), Univ. of Freiburg, Freiburg, Germany
  • fYear
    2010
  • fDate
    24-28 Jan. 2010
  • Firstpage
    799
  • Lastpage
    802
  • Abstract
    A design approach and new manufacturing technique for a novel type of stacked fiuidic multi-chamber tunable lenses is presented. The hybrid design with a PDMS fluidic platform and highly accurate silicon inserts for lenses and stops offers flexibility and extensibility, leading to fully functional miniature tunable optical lens systems with the ability to control low-order aberrations. The optical properties of this "micro-optical construction kit" are fully customizable by the arrangement and design of the inserts. The layout of the platform allows the combination of the fluidic lens system with a separately fabricated actuator module. With this, a focal length tuning range down to several millimeters can be achieved.
  • Keywords
    actuators; micromechanical devices; integrated actuator; silicon inserts; stacked fiuidic multi-chamber tunable lenses; tunable micro-fluidic multi-component micro-lens system; Actuators; Apertures; Biomembranes; Glass; Lenses; Optical design; Optical devices; Optical polymers; Optical tuning; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
  • Conference_Location
    Wanchai, Hong Kong
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-5761-8
  • Electronic_ISBN
    1084-6999
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2010.5442285
  • Filename
    5442285