DocumentCode
2007268
Title
Tunable micro-fluidic multi-component micro-lens system with integrated actuator
Author
Mader, Daniel ; Marhöfer, Max ; Waibel, Philipp ; Zappe, Hans ; Seifert, Andreas
Author_Institution
Dept. of Microsyst. Eng. (IMTEK), Univ. of Freiburg, Freiburg, Germany
fYear
2010
fDate
24-28 Jan. 2010
Firstpage
799
Lastpage
802
Abstract
A design approach and new manufacturing technique for a novel type of stacked fiuidic multi-chamber tunable lenses is presented. The hybrid design with a PDMS fluidic platform and highly accurate silicon inserts for lenses and stops offers flexibility and extensibility, leading to fully functional miniature tunable optical lens systems with the ability to control low-order aberrations. The optical properties of this "micro-optical construction kit" are fully customizable by the arrangement and design of the inserts. The layout of the platform allows the combination of the fluidic lens system with a separately fabricated actuator module. With this, a focal length tuning range down to several millimeters can be achieved.
Keywords
actuators; micromechanical devices; integrated actuator; silicon inserts; stacked fiuidic multi-chamber tunable lenses; tunable micro-fluidic multi-component micro-lens system; Actuators; Apertures; Biomembranes; Glass; Lenses; Optical design; Optical devices; Optical polymers; Optical tuning; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location
Wanchai, Hong Kong
ISSN
1084-6999
Print_ISBN
978-1-4244-5761-8
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2010.5442285
Filename
5442285
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