Title :
Tunable micro-fluidic multi-component micro-lens system with integrated actuator
Author :
Mader, Daniel ; Marhöfer, Max ; Waibel, Philipp ; Zappe, Hans ; Seifert, Andreas
Author_Institution :
Dept. of Microsyst. Eng. (IMTEK), Univ. of Freiburg, Freiburg, Germany
Abstract :
A design approach and new manufacturing technique for a novel type of stacked fiuidic multi-chamber tunable lenses is presented. The hybrid design with a PDMS fluidic platform and highly accurate silicon inserts for lenses and stops offers flexibility and extensibility, leading to fully functional miniature tunable optical lens systems with the ability to control low-order aberrations. The optical properties of this "micro-optical construction kit" are fully customizable by the arrangement and design of the inserts. The layout of the platform allows the combination of the fluidic lens system with a separately fabricated actuator module. With this, a focal length tuning range down to several millimeters can be achieved.
Keywords :
actuators; micromechanical devices; integrated actuator; silicon inserts; stacked fiuidic multi-chamber tunable lenses; tunable micro-fluidic multi-component micro-lens system; Actuators; Apertures; Biomembranes; Glass; Lenses; Optical design; Optical devices; Optical polymers; Optical tuning; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2010.5442285