A viscoelastic-aware experimentally-derived model for analog RF MEMS varactors

Author

Hsu, Hao-Han ; Peroulis, Dimitrios

Author_Institution

Birck Nanotechnol. Center, Purdue Univ., West Lafayette, IN, USA

fYear

2010

fDate

24-28 Jan. 2010

Firstpage

783

Lastpage

786

Abstract

In this paper we present, for the first time, an experimentally-extracted model for the spring constant and tuning range of an analog RF-MEMS varactor that includes viscoelastic effects in RF-MEMS devices. By utilizing a bi-state bias condition with one state lasting 60 minutes and the other 1 minute, this model focuses on capturing the true electromechanical behavior of the varactor. An experimental setup with very high long-term accuracy is created to measure capacitance of the varactor up to 1,370 hours. The impact of these effects and the effectiveness of the model are demonstrated on a tunable-resonator loaded with RF-MEMS varactors.

Keywords

micromechanical devices; resonators; tuning; varactors; viscoelasticity; analog RF MEMS varactor; bi-state bias condition; electromechanical behavior; spring constant; time 1 min; time 60 min; tunable resonator; tuning range; viscoelastic effects; Atomic force microscopy; Elasticity; Electrostatic measurements; Force measurement; Gold; Radiofrequency microelectromechanical systems; Springs; Testing; Varactors; Viscosity;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on

Conference_Location

Wanchai, Hong Kong

ISSN

1084-6999

Print_ISBN

978-1-4244-5761-8

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2010.5442289

Filename

5442289