Resonant Pull-in for a variable gap lateral contact RF MEMS switch

This paper reports the experimental results for Resonant Pull-in phenomenon (V_RP = V_DC + RMS v_ac) as an actuation method for a lateral contact RFMEMS switch. We show that VRP is significantly less than the static pull-in voltage (V_SP = V_DC). We show that the reduction in actuation voltage can be greatly enhanced by operating at the optimal non-linear resonance frequency. We show that based on the applied voltages and available gap at the head, the switch can operate as a resonator, resonant switch or as an impact oscillator. Finally, we report for the first time the timing response for resonant pull-in case.