Micromechanically-coupled resonated system for synchronized oscillation with improved phase noise

Frequency enhancement with decreased fluctuation is available by using micromechanically-coupled synchronized resonator system. The system consists of two geometrically designed and empirically fabricated singly-clamped beam-shaped cantilevers (19.5 ¿m and 30 ¿m long ×5 ¿m wide ×100 nm thick). Two cantilevers, with resonant frequencies of 295.72 kHz (detecting) and 145.01 kHz (sensing) respectively, are coupled by a thin support as a mechanical element. The frequency response signal can thus be doubled with a decreased fluctuation when the detecting cantilever is synchronized with the sensing one. A reformed micromechanically-coupled resonator system is further designed using Coventor Ware^¿ software and vibration modes are simulated for next application study.