Title :
Influence of the temperature dependent A-f effect on the design and performance of oscillators
Author :
Lee, Hyung Kyu ; Salvia, James ; Bahl, Gaurav ; Melamud, Renata ; Yoneoka, Shingo ; Qu, Yu Qiao ; Chandorkar, Saurabh ; Hopcroft, Matthew A. ; Kim, Bongsang ; Kenny, Thomas W.
Author_Institution :
Stanford Univ., Stanford, CA, USA
Abstract :
In this work, we develop a theoretical explanation for the temperature dependence of the nonlinear amplitude-frequency (A-f) effect in micromechanical resonators. Using this theory, we explain the discrepancy in frequency-temperature (f-T) characteristics between open-loop observation and closed-loop measurements. We show how the temperature dependence of the A-f effect introduces bias voltage dependence in the f-T characteristics of an oscillator system. Based upon this understanding, we present a new method to remove the temperature dependence of the A-f effect from an oscillator system, thereby eliminating the bias voltage (Vbias) dependency, and enabling predictable f-T characteristics.
Keywords :
micromechanical resonators; nonlinear network analysis; oscillators; MEMS oscillators design; MEMS oscillators performance; bias voltage dependency; closed-loop measurements; f-T characteristics; frequency-temperature characteristics; micromechanical resonators; nonlinear amplitude-frequency effect; open-loop observation; temperature dependent A-f effect;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2010.5442312