Title :
Thermogravimetric device with integrated thermal actuators
Author :
Iervolino, E. ; van Herwaarden, A.W. ; van der Vlist, W. ; Sarro, P.M.
Author_Institution :
Xensor Integration, Delfgauw, Netherlands
Abstract :
This paper presents the first MEMS device for ThermoGravimetric Analysis (TGA) with integrated thermal actuators. It consists of a sensing cantilever paddle connected to two separated thermal actuators, one at each side of the cantilever. Moreover, it has an integrated thermocouple that allows combined TGA and calorimetric measurements. To demonstrate the device performance TGA of copper sulfate pentahydrate (CuSO4·5H2O) samples has been performed. The operation range for the TGA device is 40 pg up to 0.1 ¿g for the mass and 25 up to 650°C for the temperature. The mass sensitivity is about 200 Hz for a 1 ng sample on the 10 kHz resonance frequency.
Keywords :
actuators; calorimetry; cantilevers; micromechanical devices; thermal analysis; thermocouples; MEMS device; TGA; calorimetric measurements; copper sulfate pentahydrate; frequency 10 kHz; integrated thermal actuators; sensing cantilever paddle; temperature 650 degC; thermocouple; thermogravimetric analysis; Bridge circuits; Capacitive sensors; Piezoelectric actuators; Piezoresistance; Resonance; Resonant frequency; Silicon compounds; Temperature distribution; Temperature sensors; Thermal resistance;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2010.5442316
