DocumentCode :
2008017
Title :
Triaxis magnetoresistive (MR) sensor using permalloy plate of distorting magnetic field
Author :
Suzuki, M. ; Fukutani, T. ; Hirata, T. ; Aoyagi, S. ; Shingubara, S. ; Tajiri, H. ; Yoshikawa, Y. ; Nagahata, T.
Author_Institution :
Kansai Univ., Suita, Japan
fYear :
2010
fDate :
24-28 Jan. 2010
Firstpage :
671
Lastpage :
674
Abstract :
This paper proposes a triaxis magnetoresistive (MR) sensor of detecting not only x- and y-axes magnetic field intensities but also z-axis one, where all fields are based on the sensor coordinate system. Namely, not only azimuth but also angle of elevation of the sensor can be detected from triaxis components of geomagnetic field. The principle is as follows: a permalloy (FeNi) plate is stood aside MR element. The plate distorts magnetic field and generates x- (or y-) component from originally z-directional field. So, the resistance of MR element changes in proportional to z-axis field intensity, provided that other axes intensities are kept constant. By contriving a processing circuit, three axes components can be separately detected.
Keywords :
Permalloy; magnetic fields; magnetoresistive devices; microsensors; distorting magnetic field; permalloy plate; triaxis magnetoresistive sensor; Azimuth; Coils; Gas detectors; Magnetic field measurement; Magnetic fields; Magnetic sensors; Magnetic separation; Magnetoresistance; Sensor systems; Soft magnetic materials;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
ISSN :
1084-6999
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
Type :
conf
DOI :
10.1109/MEMSYS.2010.5442317
Filename :
5442317
Link To Document :
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