DocumentCode
2008017
Title
Triaxis magnetoresistive (MR) sensor using permalloy plate of distorting magnetic field
Author
Suzuki, M. ; Fukutani, T. ; Hirata, T. ; Aoyagi, S. ; Shingubara, S. ; Tajiri, H. ; Yoshikawa, Y. ; Nagahata, T.
Author_Institution
Kansai Univ., Suita, Japan
fYear
2010
fDate
24-28 Jan. 2010
Firstpage
671
Lastpage
674
Abstract
This paper proposes a triaxis magnetoresistive (MR) sensor of detecting not only x- and y-axes magnetic field intensities but also z-axis one, where all fields are based on the sensor coordinate system. Namely, not only azimuth but also angle of elevation of the sensor can be detected from triaxis components of geomagnetic field. The principle is as follows: a permalloy (FeNi) plate is stood aside MR element. The plate distorts magnetic field and generates x- (or y-) component from originally z-directional field. So, the resistance of MR element changes in proportional to z-axis field intensity, provided that other axes intensities are kept constant. By contriving a processing circuit, three axes components can be separately detected.
Keywords
Permalloy; magnetic fields; magnetoresistive devices; microsensors; distorting magnetic field; permalloy plate; triaxis magnetoresistive sensor; Azimuth; Coils; Gas detectors; Magnetic field measurement; Magnetic fields; Magnetic sensors; Magnetic separation; Magnetoresistance; Sensor systems; Soft magnetic materials;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location
Wanchai, Hong Kong
ISSN
1084-6999
Print_ISBN
978-1-4244-5761-8
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2010.5442317
Filename
5442317
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