• DocumentCode
    2008017
  • Title

    Triaxis magnetoresistive (MR) sensor using permalloy plate of distorting magnetic field

  • Author

    Suzuki, M. ; Fukutani, T. ; Hirata, T. ; Aoyagi, S. ; Shingubara, S. ; Tajiri, H. ; Yoshikawa, Y. ; Nagahata, T.

  • Author_Institution
    Kansai Univ., Suita, Japan
  • fYear
    2010
  • fDate
    24-28 Jan. 2010
  • Firstpage
    671
  • Lastpage
    674
  • Abstract
    This paper proposes a triaxis magnetoresistive (MR) sensor of detecting not only x- and y-axes magnetic field intensities but also z-axis one, where all fields are based on the sensor coordinate system. Namely, not only azimuth but also angle of elevation of the sensor can be detected from triaxis components of geomagnetic field. The principle is as follows: a permalloy (FeNi) plate is stood aside MR element. The plate distorts magnetic field and generates x- (or y-) component from originally z-directional field. So, the resistance of MR element changes in proportional to z-axis field intensity, provided that other axes intensities are kept constant. By contriving a processing circuit, three axes components can be separately detected.
  • Keywords
    Permalloy; magnetic fields; magnetoresistive devices; microsensors; distorting magnetic field; permalloy plate; triaxis magnetoresistive sensor; Azimuth; Coils; Gas detectors; Magnetic field measurement; Magnetic fields; Magnetic sensors; Magnetic separation; Magnetoresistance; Sensor systems; Soft magnetic materials;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
  • Conference_Location
    Wanchai, Hong Kong
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-5761-8
  • Electronic_ISBN
    1084-6999
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2010.5442317
  • Filename
    5442317