Photoluminescence and electrical characterization of transparent Eu and Pd-doped TiO2 thin films

In this work, optical and electrical characterization of transparent Eu and Pd-doped TiO₂ thin films have been presented. Thin films were deposited by low pressure hot target reactive magnetron sputtering form metallic Ti-Pd-Eu mosaic target on silicon. It has been shown that incorporation of Pd and Eu dopants into TiO₂ matrix could modify its properties to obtain electrically and optically active oxide-semiconductor with the electron-type (n) of electrical conduction at room temperature. Pd dopant changes the electrical properties of TiO₂ from dielectric oxide to conducting oxide. Eu dopant results in enhanced optical activity of Pd-doped TiO₂ thin films in ultraviolet range