Title :
Listening to MEMS: An acoustic vibrometer
Author :
Yntema, D.R. ; Haneveld, J. ; Engelen, J.B.C. ; Brookhuis, R.A. ; Sanders, R. G P ; Wiegerink, R.J. ; Elwenspoek, M.
Author_Institution :
TST Group, Univ. of Twente, Enschede, Netherlands
Abstract :
A new way to characterize vibrating MEMS devices is presented. Using an acoustic particle velocity sensor the coupled sound field is measured, which is a measure for the movement of the MEMS device. We present several possible applications of this measurement method. It can be used as a read-out system for a mass flow sensor, and for characterization of in- and out-of-plane movements of MEMS devices. The method is an interesting alternative to laser scanning vibrometry due to its small size and low complexity; furthermore, it allows the user to `listen´ directly to MEMS devices.
Keywords :
acoustic devices; flow measurement; microsensors; readout electronics; vibration measurement; MEMS; acoustic particle velocity sensor; acoustic vibrometer; mass flow sensor; read-out system; Acoustic devices; Acoustic measurements; Acoustic sensors; Microelectromechanical devices; Micromechanical devices; Motion measurement; Particle measurements; Sensor phenomena and characterization; Velocity measurement; Vibrometers;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2010.5442319
