Title :
PMUT array design for a handwriting input system
Author :
Liao, Wenjun ; Ren, Tianling ; Yang, Yi ; Kong, Xiangming ; Zhu, Yiping ; Wang, Ligang ; Wang, Yufeng ; Miao, Gujin ; Liu, Litian
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing, China
Abstract :
The novel handwriting input system (HIS) has been designed with the ferroelectrics-based micro-acoustic array, which has been fabricated using silicon based micro-machining process. This array is composed of two acoustic dipoles. It can increase output acoustic power effectively while maintaining omni-direction.
Keywords :
handwriting recognition; interactive devices; ultrasonic transducer arrays; HIS; PMUT array design; acoustic dipoles; ferroelectrics based microacoustic array; handwriting input system; micromachining process; Acoustic arrays; Array signal processing; Diodes; Equations; Handwriting recognition; Optical receivers; Transmitters; Ultrasonic transducer arrays; Voltage; Writing;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2010.5442325
