DocumentCode
2008245
Title
PMUT array design for a handwriting input system
Author
Liao, Wenjun ; Ren, Tianling ; Yang, Yi ; Kong, Xiangming ; Zhu, Yiping ; Wang, Ligang ; Wang, Yufeng ; Miao, Gujin ; Liu, Litian
Author_Institution
Inst. of Microelectron., Tsinghua Univ., Beijing, China
fYear
2010
fDate
24-28 Jan. 2010
Firstpage
639
Lastpage
642
Abstract
The novel handwriting input system (HIS) has been designed with the ferroelectrics-based micro-acoustic array, which has been fabricated using silicon based micro-machining process. This array is composed of two acoustic dipoles. It can increase output acoustic power effectively while maintaining omni-direction.
Keywords
handwriting recognition; interactive devices; ultrasonic transducer arrays; HIS; PMUT array design; acoustic dipoles; ferroelectrics based microacoustic array; handwriting input system; micromachining process; Acoustic arrays; Array signal processing; Diodes; Equations; Handwriting recognition; Optical receivers; Transmitters; Ultrasonic transducer arrays; Voltage; Writing;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location
Wanchai, Hong Kong
ISSN
1084-6999
Print_ISBN
978-1-4244-5761-8
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2010.5442325
Filename
5442325
Link To Document