DocumentCode :
2008305
Title :
Navigation grade MEMS accelerometer
Author :
Zwahlen, Pascal ; Nguyen, Anne-Marie ; Dong, Yufeng ; Rudolf, Felix ; Pastre, Marc ; Schmid, Hanspeter
fYear :
2010
fDate :
24-28 Jan. 2010
Firstpage :
631
Lastpage :
634
Abstract :
This paper reports on a high performance navigation grade MEMS servo accelerometer targeted at inertial applications. Reported results are for a bulk MEMS capacitive sensor with 11g full scale over a 300 Hz bandwidth interfaced with a highly optimized servo-loop 5th-order sigma-delta electronic. Measurements demonstrate a long-term bias stability of +/-0.2mg, a second order non-linearity K2 < 5 ¿g/g2, an in-band noise floor of 1 ¿g/¿Hz and a Dynamic Range over 1 Hz bandwidth of 22 bits.
Keywords :
accelerometers; capacitive sensors; inertial navigation; microsensors; MEMS capacitive sensor; bandwidth; frequency 300 Hz; in-band noise floor; inertial applications; long-term bias stability; navigation grade MEMS servo accelerometer; second order non-linearity; servo-loop 5th-order sigma-delta electronic; Accelerometers; Bandwidth; Capacitive sensors; Delta-sigma modulation; Dynamic range; Micromechanical devices; Navigation; Noise measurement; Servomechanisms; Stability;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
ISSN :
1084-6999
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
Type :
conf
DOI :
10.1109/MEMSYS.2010.5442327
Filename :
5442327
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2008305
بازگشت