• DocumentCode
    2008485
  • Title

    Wafer scale coating of polymer cantilever fabricated by nanoimprint lithography

  • Author

    Greve, Anders ; Dohn, Søren ; Keller, Stephan ; Vig, Asger L. ; Kristensen, Anders ; Nielsen, Claus H. ; Larsen, Niels B. ; Boisen, Anja

  • Author_Institution
    Tech. Univ. of Denmark, Lyngby, Denmark
  • fYear
    2010
  • fDate
    24-28 Jan. 2010
  • Firstpage
    612
  • Lastpage
    614
  • Abstract
    Microcantilevers can be fabricated in TOPAS by nanoimprint lithography, with the dimensions of 500 ¿m length 4.5 ¿m thickness and 100 ¿m width. By using a plasma polymerization technique it is possible to selectively functionalize individually cantilevers with a polymer coating, on wafer scale by using a shadow masking technique.
  • Keywords
    cantilevers; microfabrication; microsensors; nanolithography; polymer films; polymerisation; soft lithography; wafer-scale integration; TOPAS; microcantilevers; nanoimprint lithography fabrication; plasma polymerization technique; polymer cantilever; polymer coating; shadow masking technique; wafer scale coating; Coatings; Etching; Fabrication; Gold; Nanolithography; Passivation; Plasma applications; Polymer films; Silicon; Stress;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
  • Conference_Location
    Wanchai, Hong Kong
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-5761-8
  • Electronic_ISBN
    1084-6999
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2010.5442334
  • Filename
    5442334
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2008485