In-plane silicon-on-insulator optical MEMS accelerometer using waveguide fabry-perot microcavity with silicon/air bragg mirrors

Author

Zandi, Kazem ; Wong, Brian ; Zou, Jing ; Kruzelecky, Roman V. ; Jamroz, Wes ; Peter, Yves-Alain

Author_Institution

Ecole Polytech. de Montreal, Montreal, ON, Canada

fYear

2010

fDate

24-28 Jan. 2010

Firstpage

839

Lastpage

842

Abstract

A novel in-plane Silicon-On-insulator (SOI) optical accelerometer using a Fabry-Perot microcavity with two distributed Bragg reflectors (DBR) is presented, in which one DBR mirror is attached to two suspended proof masses. As a consequence of acceleration, the relative displacement of the movable mirror with respect to the fixed one changes the cavity length and modifies the Fabry-Perot resonance. All of the device components are fabricated by using one single fabrication step. The sensor performance could reach Â¿g resolution with a demonstrated 2.5 nm/g sensitivity and 400 Â¿g resolution.

Keywords

distributed Bragg reflectors; silicon-on-insulator; DBR mirror; Fabry-Perot resonance; cavity length; distributed Bragg reflectors; in-plane silicon-on-insulator; movable mirror; optical MEMS accelerometer; optical accelerometer; relative displacement; sensor performance; silicon/air bragg mirrors; waveguide Fabry-Perot microcavity; Acceleration; Accelerometers; Distributed Bragg reflectors; Fabry-Perot; Microcavities; Micromechanical devices; Mirrors; Optical sensors; Optical waveguides; Silicon on insulator technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on

Conference_Location

Wanchai, Hong Kong

ISSN

1084-6999

Print_ISBN

978-1-4244-5761-8

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2010.5442337

Filename

5442337