Title :
In-plane silicon-on-insulator optical MEMS accelerometer using waveguide fabry-perot microcavity with silicon/air bragg mirrors
Author :
Zandi, Kazem ; Wong, Brian ; Zou, Jing ; Kruzelecky, Roman V. ; Jamroz, Wes ; Peter, Yves-Alain
Author_Institution :
Ecole Polytech. de Montreal, Montreal, ON, Canada
Abstract :
A novel in-plane Silicon-On-insulator (SOI) optical accelerometer using a Fabry-Perot microcavity with two distributed Bragg reflectors (DBR) is presented, in which one DBR mirror is attached to two suspended proof masses. As a consequence of acceleration, the relative displacement of the movable mirror with respect to the fixed one changes the cavity length and modifies the Fabry-Perot resonance. All of the device components are fabricated by using one single fabrication step. The sensor performance could reach ¿g resolution with a demonstrated 2.5 nm/g sensitivity and 400 ¿g resolution.
Keywords :
distributed Bragg reflectors; silicon-on-insulator; DBR mirror; Fabry-Perot resonance; cavity length; distributed Bragg reflectors; in-plane silicon-on-insulator; movable mirror; optical MEMS accelerometer; optical accelerometer; relative displacement; sensor performance; silicon/air bragg mirrors; waveguide Fabry-Perot microcavity; Acceleration; Accelerometers; Distributed Bragg reflectors; Fabry-Perot; Microcavities; Micromechanical devices; Mirrors; Optical sensors; Optical waveguides; Silicon on insulator technology;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2010.5442337
