Title :
Physical properties of transparent conductive oxides prepared by RF reactive sputtering
Author :
Tvarozek, V. ; Novotny, I. ; Sutta, P. ; Flickyngerova, S. ; Harmatha, L. ; Vavrinsky, E. ; Nigrovicova, M. ; Mullerova, J.
Author_Institution :
Dept. of Microelectron., Slovak Univ. of Technol., Bratislava
Abstract :
Transparent conductive oxide thin films (indium tin oxide, zinc oxide and Al doped zinc oxide) were prepared by RF diode sputtering. Selected properties of these films (structure, resistivity and transparency) were investigated with the aim to use them in thin film solar cells
Keywords :
II-VI semiconductors; aluminium; electrical resistivity; indium compounds; semiconductor materials; semiconductor thin films; solar cells; sputter deposition; transparency; zinc compounds; Al doped zinc oxide; InSnO; RF diode sputtering; RF reactive sputtering; ZnO:Al; indium tin oxide; physical properties; resistivity; structure; thin film solar cells; transparency; transparent conductive oxides thin films; Conductive films; Conductivity; Indium tin oxide; Optical films; Radio frequency; Rough surfaces; Semiconductor films; Sputtering; Surface roughness; Zinc oxide;
Conference_Titel :
Advanced Semiconductor Devices and Microsystems, 2006. ASDAM '06. International Conference on
Conference_Location :
Smolenice Castle
Print_ISBN :
1-4244-0369-0
DOI :
10.1109/ASDAM.2006.331181
