Title :
Influence of the doping material on the benzene detection
Author :
Ivanov, P. ; Blanco, F. ; Gràcia, I. ; Sabaté, N. ; Vilanova, X. ; Correig, X. ; Fonseca, L. ; Figueras, E. ; Santander, J. ; Rubio, R. ; Cané, C.
Author_Institution :
Centro Nacional de Microelectron., CNM-CSIC, Bellaterra
Abstract :
In this paper we describe the fabrication of low-cost micro-hotplate benzene sensors by using screen-printing technology. Sensitive layers of tin and tungsten oxide (pure and doped with 1% in weight of Au, Pt and Pd) were deposited on silicon micromachined substrates with low thermal inertia. Gas measurements were performed with the fabricated sensors and the results confirm the viability of the techniques introduced to obtain micromachined sensors suitable for battery-powered gas/vapour monitors
Keywords :
doping; gas sensors; gold; microsensors; organic compounds; palladium; platinum; thick film sensors; battery powered gas/vapour monitors; benzene detection; doping material; gas measurements; micro hotplate; screen printing technology; silicon micromachined substrates; tin oxide; tungsten oxide; Biomembranes; Bonding; Doping; Electrodes; Gas detectors; Optical polymers; Packaging; Polymer films; Sensor arrays; Silicon;
Conference_Titel :
Advanced Semiconductor Devices and Microsystems, 2006. ASDAM '06. International Conference on
Conference_Location :
Smolenice Castle
Print_ISBN :
1-4244-0369-0
DOI :
10.1109/ASDAM.2006.331185
