Title :
Design and simulation of humidity micro-sensors structure based on Polymers
Author :
Suchánek, Pavel ; Husák, Miroslav
Author_Institution :
Fac. of Electr. Eng., Czech Tech. Univ., Prague
Abstract :
The aim of this paper is to report the design of the simple polymers structure humidity sensors and its mechanical and piezoresistive simulation in CoventorWare. Acquired simulation data gets a primary image about sizes bend and surface strain on microcantilever which forms sensing part of sensor
Keywords :
humidity sensors; microsensors; polymers; CoventorWare; humidity microsensors; mechanical simulation; piezoresistive simulation; polymers structure; Capacitive sensors; Conducting materials; Conductivity; Humidity; Light emitting diodes; Mechanical sensors; Micromechanical devices; Polymers; Silicon; Strain measurement;
Conference_Titel :
Advanced Semiconductor Devices and Microsystems, 2006. ASDAM '06. International Conference on
Conference_Location :
Smolenice Castle
Print_ISBN :
1-4244-0369-0
DOI :
10.1109/ASDAM.2006.331186
