Self-sensing Pr-oxi-lever (piezo-resistive SiO2 cantilever) sensors for bio/chemical detection in liquid

Author

Chen, Ying ; Li, Jungang ; Xu, Pengcheng ; Liu, Min ; Li, Xinxin

Author_Institution

State Key Lab. of Transducer Technol., Chinese Acad. of Sci., Shanghai, China

fYear

2010

fDate

24-28 Jan. 2010

Firstpage

859

Lastpage

862

Abstract

Reported is a surface-stress sensing microcantilever with signal readout piezoresistor encapsulated by electrically insulated SiO₂ for detecting bio/chemical molecules in liquid. Specifically sensitive siloxane-based molecule monolayers or bi-layer is directly modified on the SiO₂ surface via reliable Si-O covalent bond that secures sensitivity stability and long-life working of the sensor. The sensors are successfully used for detecting 2.5% aqueous tetramethylammonium hydroxide (TMAH) and avidin at 10^-11 mol/mL trace level. An interesting phenomenon of opposite surface-stress sensing signals for different-sized target-molecules are experimentally observed by the sensor and theoretically explained.

Keywords

biosensors; cantilevers; chemical sensors; microsensors; monolayers; piezoresistive devices; silicon compounds; SiO₂; TMAH; aqueous tetramethylammonium hydroxide; avidin; biomolecule detection; chemical detection; covalent bond; piezoresistive cantilever sensor; self sensing PR-oxi-lever; signal readout piezoresistor; siloxane based molecule monolayer; surface stress sensing microcantilever; Biosensors; Bonding; Chemical and biological sensors; Chemical sensors; Chemical technology; Chemical transducers; Dielectric liquids; Gold; Piezoresistance; Sensor phenomena and characterization;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on

Conference_Location

Wanchai, Hong Kong

ISSN

1084-6999

Print_ISBN

978-1-4244-5761-8

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2010.5442342

Filename

5442342