DocumentCode :
2008907
Title :
Study of electrically active defects in GaAs/InAs/GaAs QDs structures by DLTS and TEM
Author :
Prezioso, M. ; Gombia, E. ; Mosca, R. ; Nasi, L. ; Motta, A. ; Frigeri, P. ; Trevisi, G. ; Seravalli, L. ; Franchi, S.
Author_Institution :
IMEM Inst., C.N.R., Fontanini-Parma
fYear :
2006
fDate :
Oct. 2006
Firstpage :
237
Lastpage :
240
Abstract :
The apparent C-V profiles and the deep levels in GaAs/InAs/GaAs quantum dot nanostructure, have been investigated by space charge spectroscopy techniques (C-V and DLTS). Accumulation peaks and/or depletion of free carriers at the QDs plane are observed under the considered growth parameters. It is shown that, both in the cap and at the QD-layer/cap interface, the deposition of lnAs QDs induces deep levels which exhibit a logarithmic dependence of the DLTS signal amplitude from the pulse width. transmission electron microscopy (TEM) analysis shows extended defects in the cap and near the QD/cap interface, which have been correlated to electrical measurement results
Keywords :
III-V semiconductors; deep level transient spectroscopy; deep levels; defect states; gallium arsenide; indium compounds; semiconductor quantum dots; transmission electron microscopy; DLTS; active defects; deep level transient spectroscopy; electrical measurement; quantum dot nanostructure; space charge spectroscopy; transmission electron microscopy; Capacitance-voltage characteristics; Electric variables measurement; Gallium arsenide; Pulse measurements; Quantum dots; Signal analysis; Space charge; Space vector pulse width modulation; Spectroscopy; Transmission electron microscopy;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Semiconductor Devices and Microsystems, 2006. ASDAM '06. International Conference on
Conference_Location :
Smolenice Castle
Print_ISBN :
1-4244-0369-0
Type :
conf
DOI :
10.1109/ASDAM.2006.331197
Filename :
4133121
Link To Document :
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