DocumentCode
2008957
Title
A novel micro paramagnetic oxygen sensor
Author
Vonderschmidt, Stefan ; Müller, Jörg
Author_Institution
Hamburg Univ. of Technol., Hamburg, Germany
fYear
2010
fDate
24-28 Jan. 2010
Firstpage
903
Lastpage
906
Abstract
This paper describes a novel paramagnetic sensor for oxygen measurement fabricated in MEMS technology. The sensor is based on the paramagnetic characteristics of oxygen using a permanent magnet for switching the gas flow of the sample gas in a measuring channel and gauging the flow velocity, which depends on the oxygen concentration in the sample gas. Since the sensor measures the velocity using thermo anemometers without any moving components it is not limited to stationary applications.
Keywords
anemometers; gas sensors; microsensors; oxygen; paramagnetic materials; permanent magnets; velocity measurement; MEMS technology; O2; gas flow; microparamagnetic oxygen sensor; permanent magnet; thermo anemometer; Fluid flow; Fluid flow measurement; Gas detectors; Magnetic sensors; Magnetic switching; Micromechanical devices; Paramagnetic materials; Permanent magnets; Sensor phenomena and characterization; Velocity measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location
Wanchai, Hong Kong
ISSN
1084-6999
Print_ISBN
978-1-4244-5761-8
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2010.5442353
Filename
5442353
Link To Document