Title :
A novel micro paramagnetic oxygen sensor
Author :
Vonderschmidt, Stefan ; Müller, Jörg
Author_Institution :
Hamburg Univ. of Technol., Hamburg, Germany
Abstract :
This paper describes a novel paramagnetic sensor for oxygen measurement fabricated in MEMS technology. The sensor is based on the paramagnetic characteristics of oxygen using a permanent magnet for switching the gas flow of the sample gas in a measuring channel and gauging the flow velocity, which depends on the oxygen concentration in the sample gas. Since the sensor measures the velocity using thermo anemometers without any moving components it is not limited to stationary applications.
Keywords :
anemometers; gas sensors; microsensors; oxygen; paramagnetic materials; permanent magnets; velocity measurement; MEMS technology; O2; gas flow; microparamagnetic oxygen sensor; permanent magnet; thermo anemometer; Fluid flow; Fluid flow measurement; Gas detectors; Magnetic sensors; Magnetic switching; Micromechanical devices; Paramagnetic materials; Permanent magnets; Sensor phenomena and characterization; Velocity measurement;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2010.5442353
