Design and fabrication of flexible neural microprobe for three dimensional assembly

In this paper we have designed, fabricated and tested a novel three-dimensional (3D) flexible microprobe used for recording the neural signals on the escape system of America crayfish. We report an electrostatic actuation process to fold the planar probes to be the arbitrary orientations of 3D probes for neuroscience application. A flexible probe could reduce both the chronic inflammation response and material fracture when animal breathes or moves. The 3D flexible probe suits to understand how the cooperative activity for different layers of neurons. Advisedly, we present a novel fabrication for 3D flexible probe by using SU8 and Parylene technology.