DocumentCode
2009793
Title
Improved Performance and Reliability of MOSFETs with Ultrathin Gate Oxides Prepared by Conventional Furnace Oxidation of Si in Pure N/sub 2/O Ambient
Author
Lo, G.Q. ; Ting, W. ; Ahn, J. ; Kwong, D.L.
Author_Institution
The University of Texas at Austin
fYear
1991
fDate
28-30 May 1991
Firstpage
43
Lastpage
44
Keywords
CMOS technology; Degradation; Furnaces; Isolation technology; MOS capacitors; MOSFETs; Microelectronics; Oxidation; Thermal resistance; Thermal stresses;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1991. Digest of Technical Papers., 1991 Symposium on
Conference_Location
Oiso, Japan
Type
conf
DOI
10.1109/VLSIT.1991.705981
Filename
705981
Link To Document