Title :
A fast and simple method to fabricate circular microchannels in polydimethylsiloxane (PDMS)
Author :
Abdelgawad, Mohamed ; Wu, Chun ; Chien, Wei-Yin ; Sun, Yu
Author_Institution :
Univ. of Toronto, Toronto, ON, Canada
Abstract :
A coating of liquid PDMS is applied on the walls of square microchannels by introducing a pressurized air stream inside microchannels filled with PDMS. Surface tension of the liquid PDMS makes the coating take a circular cross section which is preserved by baking the device to cure the coated layer. Diameters ranging from a few to few hundred micrometers were achieved. Different coating conditions were systematically tested and design curves are reported to choose appropriate coating conditions for obtaining a desired diameter.
Keywords :
curing; microfabrication; microfluidics; polymer films; surface tension; circular cross section; circular microchannels; coated layer curing; coating conditions; design curves; device baking; liquid PDMS coating; polydimethylsiloxane; pressurized air stream; square microchannels; surface tension; Bonding; Cells (biology); Coatings; Etching; Glass; Microchannel; Microfluidics; Resists; Surface tension; Viscosity;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2010.5442395
