Title :
A novel PDMS/Parylene microvalve with three dimentional dome petal shape
Author :
Jonghyun Oh ; Gyuman Kim ; Hongseok Noh
Author_Institution :
Mech. Eng. & Mech., Drexel Univ., Philadelphia, PA, USA
Abstract :
We present a novel microvalve for the treatment of a pathological condition, hydrocephalus. This microvalve is made of PDMS/Parylene composite layer which has a 3-D dome petal shape. This geometry enables the microvalve to open easily for forward flows and to close for backward flows. New microfabrication techniques such as dome-shaped SU-8 mold fabrication and laser machining for valve opening have been investigated to build the proposed microvalve. The pressure-drop vs. flow rate characteristic of the fabricated microvalve was investigated using in-vitro flow tests.
Keywords :
bioMEMS; biomedical materials; composite materials; diseases; laser beam machining; microfabrication; microfluidics; micromachining; microvalves; patient treatment; polymers; 3-D dome petal shape; PDMS-parylene composite layer; SU-8 mold fabrication; flow rate characteristic; hydrocephalus; in-vitro flow tests; laser machining; microfabrication; microvalve; pathological condition; three dimentional dome petal shape; Abdomen; Biomembranes; Diseases; Geometry; Immune system; Mechanical engineering; Microvalves; Shape; Testing; Valves;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2010.5442396
