DocumentCode
2010201
Title
Novel single mode laser fabrication using focus ion beam (FIB) etching
Author
Kwong, Norman ; Nong Chen ; Qi, HaiHua ; Chen, Steven ; Jan-Shing Chen ; Erlig, Hernan ; Chen, T.R. ; Sherer, Axel
Author_Institution
Archcom Technol. Inc., Azusa, CA, USA
fYear
2006
fDate
5-10 March 2006
Abstract
A single mode coupled cavity laser is demonstrated using a focus ion beam (FIB) etching process. A high power vertically emitting DFB laser is also demonstrated using an angle-etch FIB process.
Keywords
distributed feedback lasers; focused ion beam technology; optical communication equipment; optical fabrication; optical testing; semiconductor lasers; sputter etching; focus ion beam etching; single mode coupled cavity laser; single mode laser fabrication; vertically emitting DFB laser; Dry etching; Ion beams; Laser beam cutting; Laser modes; Optical device fabrication; Optical surface waves; Power lasers; Semiconductor lasers; Surface emitting lasers; Vertical cavity surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical Fiber Communication Conference, 2006 and the 2006 National Fiber Optic Engineers Conference. OFC 2006
Print_ISBN
1-55752-803-9
Type
conf
DOI
10.1109/OFC.2006.215573
Filename
1636604
Link To Document