Title :
Novel single mode laser fabrication using focus ion beam (FIB) etching
Author :
Kwong, Norman ; Nong Chen ; Qi, HaiHua ; Chen, Steven ; Jan-Shing Chen ; Erlig, Hernan ; Chen, T.R. ; Sherer, Axel
Author_Institution :
Archcom Technol. Inc., Azusa, CA, USA
Abstract :
A single mode coupled cavity laser is demonstrated using a focus ion beam (FIB) etching process. A high power vertically emitting DFB laser is also demonstrated using an angle-etch FIB process.
Keywords :
distributed feedback lasers; focused ion beam technology; optical communication equipment; optical fabrication; optical testing; semiconductor lasers; sputter etching; focus ion beam etching; single mode coupled cavity laser; single mode laser fabrication; vertically emitting DFB laser; Dry etching; Ion beams; Laser beam cutting; Laser modes; Optical device fabrication; Optical surface waves; Power lasers; Semiconductor lasers; Surface emitting lasers; Vertical cavity surface emitting lasers;
Conference_Titel :
Optical Fiber Communication Conference, 2006 and the 2006 National Fiber Optic Engineers Conference. OFC 2006
Print_ISBN :
1-55752-803-9
DOI :
10.1109/OFC.2006.215573
