Title :
High current low contact resistance platinum-coated CMOS-MEMS probes
Author :
Liu, J. ; Draghi, L. ; Noman, M. ; Bain, J.A. ; Schlesinger, T.E. ; Fedder, G.K.
Author_Institution :
Carnegie Mellon Univ., Pittsburgh, PA, USA
Abstract :
We report on high current, low contact resistance, platinum-coated, lever-based CMOS-MEMS electrothermal probes with embedded displacement and force sensors for MEMS Instrumented Self-Configuring Integrated Circuits (MISCICs). The MISCIC vision is to use MEMS conductive probes to reconfigure ICs, mainly RF ICs such as inductors, by mechanically addressing and passing current pulses through resistance change vias which are embedded within chip circuitry. With a platinum-coated conductive tip of 2.6 × 2.6 ¿m2 and a contact force of around 20 ¿N, the achieved contact resistance is 0.64 ¿. The tip and its routing path survive after passing a 20 mA DC current for 60 minutes without failure.
Keywords :
CMOS integrated circuits; contact resistance; force sensors; micromechanical devices; probes; MEMS conductive probes; MEMS instrumented self-configuring integrated circuits; MISCIC; chip circuitry; current 20 mA; displacement sensors; force sensors; high current CMOS-MEMS electrothermal probes; lever-based CMOS-MEMS electrothermal probes; low contact resistance CMOS-MEMS electrothermal probes; platinum-coated CMOS-MEMS electrothermal probes; resistance 0.64 ohm; CMOS integrated circuits; Contact resistance; Electrothermal effects; Force sensors; Inductors; Instruments; Micromechanical devices; Probes; Pulse circuits; Radio frequency;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2010.5442413
