Bistable silicon microvalve with thermoelectrically driven thermopneumatic actuator for liquid flow control

This paper presents a bistable microfluidic valve with a thermopneumatic actuator that is thermoelectrically driven. A functional prototype is fabricated in silicon technology. The majority of the fabrication process, including the integration of the micro-Peltier devices, is performed at wafer level. The tested valves are switched with ±10 V pulses with an energy input of approximately 1 J for closing and 2 J for opening the valve. Leak rates below 1 ¿l/min are measured for inlet pressures up to 100 kPa.