Title :
Selective-emitter-enhanced micro thermophotovoltaic power generation system
Author :
Kirikae, Daizen ; Suzuki, Yuji ; Kasagi, Nobuhide
Author_Institution :
Univ. of Tokyo, Tokyo, Japan
Abstract :
Ti-coated Si microcavities with extremely-smooth sidewalls has been developed using DRIE and vacuum arc evaporation for improvement of energy conversion efficiency of micro thermophotovoltaic system. For 1.8 ¿m microcavities, the peaks in emittance spectra correspond well to the electromagnetic resonance modes. Micro cavities designed for Ge photovoltaic cells are also successfully microfabricated. It is found that estimates of the energy conversion efficiency of Ge PV cell are increased to 6.4 % and 13 % respectively for the emitter temperature of 900 and 1200 °C.
Keywords :
electric power generation; evaporation; microcavities; photovoltaic cells; photovoltaic power systems; sputter etching; vacuum arcs; DRIE; Ge photovoltaic cells; Ti-coated Si microcavity; electromagnetic resonance modes; emittance spectra; energy conversion efficiency; micro thermophotovoltaic system; selective-emitter-enhanced micro thermophotovoltaic power generation system; vacuum arc evaporation; Elementary particle vacuum; Energy conversion; Microcavities; Photovoltaic cells; Photovoltaic systems; Power generation; Resonance; Temperature; Vacuum arcs; Vacuum systems;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2010.5442426
