DocumentCode
2010670
Title
A piezoelectric frequency-increased power generator for scavenging low-frequency ambient vibration
Author
Galchev, Tzeno ; Aktakka, Ethem E. ; Kim, Hanseup ; Najafi, Khalil
Author_Institution
Center for Wireless Integrated Microsyst. (WIMS), Univ. of Michigan, Ann Arbor, MI, USA
fYear
2010
fDate
24-28 Jan. 2010
Firstpage
1203
Lastpage
1206
Abstract
This paper presents the design, fabrication, and testing of a piezoelectric inertial micro power generator for scavenging low-frequency non-periodic vibrations. A mechanism up-converts the ambient vibration frequency to a higher internal operation frequency, in order to achieve better electromechanical coupling and efficiency: enhancing the generators performance at very low frequencies (< 30 Hz). The generator incorporates a bulk piezoelectric ceramic machined using ultrafast laser ablation. The fabricated device generated a peak power of 100 ¿W and an average power of 3.25 ¿W from an input acceleration of 9.8 m/s2 at 10 Hz. The device operates over a frequency range of 24 Hz. The internal volume of the generator is 1.2 cm3.
Keywords
electric generators; microfabrication; micromechanical devices; parametric devices; piezoceramics; piezoelectric devices; electromechanical coupling; low frequency ambient vibration; low frequency nonperiodic vibrations; piezoelectric frequency-increased power generator; piezoelectric inertial micro power generator; ultrafast laser ablation; Ceramics; Fabrication; Frequency; Kinetic energy; Magnetic resonance; Power generation; Spirals; Springs; Testing; Vibrations;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location
Wanchai, Hong Kong
ISSN
1084-6999
Print_ISBN
978-1-4244-5761-8
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2010.5442428
Filename
5442428
Link To Document