• DocumentCode
    2010670
  • Title

    A piezoelectric frequency-increased power generator for scavenging low-frequency ambient vibration

  • Author

    Galchev, Tzeno ; Aktakka, Ethem E. ; Kim, Hanseup ; Najafi, Khalil

  • Author_Institution
    Center for Wireless Integrated Microsyst. (WIMS), Univ. of Michigan, Ann Arbor, MI, USA
  • fYear
    2010
  • fDate
    24-28 Jan. 2010
  • Firstpage
    1203
  • Lastpage
    1206
  • Abstract
    This paper presents the design, fabrication, and testing of a piezoelectric inertial micro power generator for scavenging low-frequency non-periodic vibrations. A mechanism up-converts the ambient vibration frequency to a higher internal operation frequency, in order to achieve better electromechanical coupling and efficiency: enhancing the generators performance at very low frequencies (< 30 Hz). The generator incorporates a bulk piezoelectric ceramic machined using ultrafast laser ablation. The fabricated device generated a peak power of 100 ¿W and an average power of 3.25 ¿W from an input acceleration of 9.8 m/s2 at 10 Hz. The device operates over a frequency range of 24 Hz. The internal volume of the generator is 1.2 cm3.
  • Keywords
    electric generators; microfabrication; micromechanical devices; parametric devices; piezoceramics; piezoelectric devices; electromechanical coupling; low frequency ambient vibration; low frequency nonperiodic vibrations; piezoelectric frequency-increased power generator; piezoelectric inertial micro power generator; ultrafast laser ablation; Ceramics; Fabrication; Frequency; Kinetic energy; Magnetic resonance; Power generation; Spirals; Springs; Testing; Vibrations;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
  • Conference_Location
    Wanchai, Hong Kong
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-5761-8
  • Electronic_ISBN
    1084-6999
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2010.5442428
  • Filename
    5442428