DocumentCode
2010778
Title
Optical and surface properties of morphology-controlled sub-20 nm polymer nanotips/nanopores
Author
Hong, Chien-Chong ; Huang, Pin ; Shieh, Jiann
Author_Institution
Dept. of Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
fYear
2010
fDate
24-28 Jan. 2010
Firstpage
584
Lastpage
587
Abstract
This paper presents optical and surface properties of morphology-controlled sub-20 nm polymer nanotips and nanopores, fabricated by thermal nanoimprint lithography. COC plastic surfaces with different nanostructural morphologies have been successfully nanoimprinted with different molding temperatures using the same mold structure. No additional chemical coating was needed to modify COC plastic from the native contact angle of 90° into a hydrophobic/superhydrophobic surface (100°~155°). The optical transmittance of the COC chip with double-sided nanostructured surfaces increased from 90% to 98% in the visible wavelength range.
Keywords
nanofabrication; nanolithography; optical properties; polymer blends; soft lithography; surface morphology; COC chip; COC plastic surfaces; cyclic olefin copolymer; nanofabrication; nanostructural morphology; optical properties; optical transmittance; polymer nanopores; polymer nanotips; superhydrophobic surface; surface properties; thermal nanoimprint lithography; visible wavelength range; Chemicals; Coatings; Nanolithography; Nanoporous materials; Optical polymers; Optical surface waves; Plastics; Surface morphology; Surface waves; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location
Wanchai, Hong Kong
ISSN
1084-6999
Print_ISBN
978-1-4244-5761-8
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2010.5442434
Filename
5442434
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