DocumentCode :
2010778
Title :
Optical and surface properties of morphology-controlled sub-20 nm polymer nanotips/nanopores
Author :
Hong, Chien-Chong ; Huang, Pin ; Shieh, Jiann
Author_Institution :
Dept. of Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
fYear :
2010
fDate :
24-28 Jan. 2010
Firstpage :
584
Lastpage :
587
Abstract :
This paper presents optical and surface properties of morphology-controlled sub-20 nm polymer nanotips and nanopores, fabricated by thermal nanoimprint lithography. COC plastic surfaces with different nanostructural morphologies have been successfully nanoimprinted with different molding temperatures using the same mold structure. No additional chemical coating was needed to modify COC plastic from the native contact angle of 90° into a hydrophobic/superhydrophobic surface (100°~155°). The optical transmittance of the COC chip with double-sided nanostructured surfaces increased from 90% to 98% in the visible wavelength range.
Keywords :
nanofabrication; nanolithography; optical properties; polymer blends; soft lithography; surface morphology; COC chip; COC plastic surfaces; cyclic olefin copolymer; nanofabrication; nanostructural morphology; optical properties; optical transmittance; polymer nanopores; polymer nanotips; superhydrophobic surface; surface properties; thermal nanoimprint lithography; visible wavelength range; Chemicals; Coatings; Nanolithography; Nanoporous materials; Optical polymers; Optical surface waves; Plastics; Surface morphology; Surface waves; Temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
ISSN :
1084-6999
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
Type :
conf
DOI :
10.1109/MEMSYS.2010.5442434
Filename :
5442434
Link To Document :
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