• DocumentCode
    2010778
  • Title

    Optical and surface properties of morphology-controlled sub-20 nm polymer nanotips/nanopores

  • Author

    Hong, Chien-Chong ; Huang, Pin ; Shieh, Jiann

  • Author_Institution
    Dept. of Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
  • fYear
    2010
  • fDate
    24-28 Jan. 2010
  • Firstpage
    584
  • Lastpage
    587
  • Abstract
    This paper presents optical and surface properties of morphology-controlled sub-20 nm polymer nanotips and nanopores, fabricated by thermal nanoimprint lithography. COC plastic surfaces with different nanostructural morphologies have been successfully nanoimprinted with different molding temperatures using the same mold structure. No additional chemical coating was needed to modify COC plastic from the native contact angle of 90° into a hydrophobic/superhydrophobic surface (100°~155°). The optical transmittance of the COC chip with double-sided nanostructured surfaces increased from 90% to 98% in the visible wavelength range.
  • Keywords
    nanofabrication; nanolithography; optical properties; polymer blends; soft lithography; surface morphology; COC chip; COC plastic surfaces; cyclic olefin copolymer; nanofabrication; nanostructural morphology; optical properties; optical transmittance; polymer nanopores; polymer nanotips; superhydrophobic surface; surface properties; thermal nanoimprint lithography; visible wavelength range; Chemicals; Coatings; Nanolithography; Nanoporous materials; Optical polymers; Optical surface waves; Plastics; Surface morphology; Surface waves; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
  • Conference_Location
    Wanchai, Hong Kong
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-5761-8
  • Electronic_ISBN
    1084-6999
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2010.5442434
  • Filename
    5442434