Title :
Micro position control of a 3-RRR compliant mechanism
Author :
Acer, M. ; Sabanovic, Asif
Author_Institution :
Mech. Eng., Istanbul Tech. Univ., Istanbul, Turkey
Abstract :
A planar parallel compliant mechanism based on 3-RRR kinematic structure is designed to be used as a micro positioning stage. The position of the center is measured by using a laser position sensor and the mechanism is actuated by piezoelectric actuators. The stage displacements are analyzed by using structural Finite Element Analysis (FEA). However the experimental displacement results for the manufactured mechanism are not compatible with the FEA which means that we have errors due to manufacturing, assembly etc. A position control using Sliding Mode Control with Disturbance Observer is proposed for the reference tracking of the center of the stage. Piezoelectric actuator linear models are used for disturbance rejection. Finally, the position control of the mechanism is succeeded although it has inadmissible errors compared to FEA.
Keywords :
finite element analysis; linear systems; observers; piezoelectric actuators; position control; sensors; variable structure systems; 3-RRR compliant mechanism; 3-RRR kinematic structure; FEA; assembly; disturbance observer; disturbance rejection; laser position sensor; manufacturing; microposition control; piezoelectric actuator linear models; planar parallel compliant mechanism; reference tracking; sliding mode control; stage displacements; structural finite element analysis; Finite element analysis; Joints; Kinematics; Manufacturing processes; Observers; Piezoelectric actuators; Position control; 3-RRR mechanism; compliant mechanism; flexure based mechanism; observer; piezoelectric actuator control; sliding mode control;
Conference_Titel :
Industrial Technology (ICIT), 2013 IEEE International Conference on
Conference_Location :
Cape Town
Print_ISBN :
978-1-4673-4567-5
Electronic_ISBN :
978-1-4673-4568-2
DOI :
10.1109/ICIT.2013.6505658
