Title :
Photo-response compensated piezoresistive cantilever for use in fluorescence microscopy
Author :
Jung, Uijin ; Kuwana, Kenta ; Takahashi, Hidetoshi ; Kan, Tetsuo ; Takei, Yusuke ; Noda, Kentaro ; Iwase, Eiji ; Matsumoto, Kiyoshi ; Shimoyama, Isao
Author_Institution :
Univ. of Tokyo, Tokyo, Japan
Abstract :
This paper presents the design, fabrication, and the characterization of a photo-response compensated piezoresistive cantilever. The application field of the cantilever is to measure cellular mechanical properties under fluorescence microscopy. Photo-response which is caused by an excitation light of a fluorescence microscope interferes with measurement. We proposed piezoresistive cantilevers consist of a force-sensing cantilever with a reference cantilever to cancel out the photo-response. We measured the photo-response of the fabricated device, by varying wavelength, light intensity and light incidence angle. The experimental results show that the photo-response was decreased by 87%. This verified that present device has effective photo-response compensation by using the reference cantilever.
Keywords :
cantilevers; compensation; fluorescence spectroscopy; force sensors; piezoresistive devices; cellular mechanical properties; excitation light; fluorescence microscopy; force-sensing cantilever; light incidence angle; light intensity; photoresponse compensation; piezoresistive cantilever; reference cantilever; Circuits; Electrical resistance measurement; Fluorescence; Force measurement; Mechanical variables measurement; Piezoresistance; Scanning electron microscopy; Stress; Surface resistance; Wavelength measurement;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2010.5442435
