Photo-response compensated piezoresistive cantilever for use in fluorescence microscopy

Author

Jung, Uijin ; Kuwana, Kenta ; Takahashi, Hidetoshi ; Kan, Tetsuo ; Takei, Yusuke ; Noda, Kentaro ; Iwase, Eiji ; Matsumoto, Kiyoshi ; Shimoyama, Isao

Author_Institution

Univ. of Tokyo, Tokyo, Japan

fYear

2010

fDate

24-28 Jan. 2010

Firstpage

588

Lastpage

591

Abstract

This paper presents the design, fabrication, and the characterization of a photo-response compensated piezoresistive cantilever. The application field of the cantilever is to measure cellular mechanical properties under fluorescence microscopy. Photo-response which is caused by an excitation light of a fluorescence microscope interferes with measurement. We proposed piezoresistive cantilevers consist of a force-sensing cantilever with a reference cantilever to cancel out the photo-response. We measured the photo-response of the fabricated device, by varying wavelength, light intensity and light incidence angle. The experimental results show that the photo-response was decreased by 87%. This verified that present device has effective photo-response compensation by using the reference cantilever.

Keywords

cantilevers; compensation; fluorescence spectroscopy; force sensors; piezoresistive devices; cellular mechanical properties; excitation light; fluorescence microscopy; force-sensing cantilever; light incidence angle; light intensity; photoresponse compensation; piezoresistive cantilever; reference cantilever; Circuits; Electrical resistance measurement; Fluorescence; Force measurement; Mechanical variables measurement; Piezoresistance; Scanning electron microscopy; Stress; Surface resistance; Wavelength measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on

Conference_Location

Wanchai, Hong Kong

ISSN

1084-6999

Print_ISBN

978-1-4244-5761-8

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2010.5442435

Filename

5442435