• DocumentCode
    2010804
  • Title

    Fully SiO/sub 2/ Isolated High Speed Self-Aligned Bipolar Transistor on Thin SOI

  • Author

    Nishizawa, H. ; Azuma, S. ; Yoshitake, T. ; Kawata, S. ; Ikeda, Takashi ; Kawaji, M. ; Anzai, A.

  • Author_Institution
    Hitachi VLSI Engineering Ltd., Japan
  • fYear
    1991
  • fDate
    28-30 May 1991
  • Firstpage
    51
  • Lastpage
    52
  • Keywords
    Bipolar integrated circuits; Bipolar transistor circuits; Bipolar transistors; Conductive films; Dielectric thin films; Fabrication; High speed integrated circuits; Semiconductor films; Silicon; Temperature distribution;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, 1991. Digest of Technical Papers., 1991 Symposium on
  • Conference_Location
    Oiso, Japan
  • Type

    conf

  • DOI
    10.1109/VLSIT.1991.705985
  • Filename
    705985
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2010804