Study of an atmospheric-pressure dielectric barrier discharge developed for large area material processing

Summary form only given, as follows. An atmospheric-pressure dielectric barrier discharge plasma source was developed aiming for large-area surface treatment of various materials. The plasma is generated using a 13.56 MHz RF source and its dimension is approximately 200 mm /spl times/ 20 mm In order to enhance the processing efficiency, double structure electrodes and dielectricws are constructed. Using electrical and optical methods, important plasma parameters were measured along the length direction of the plasma.