Title :
Lifetime of thermosonic copper ball bonds on aluminum metallization pads
Author :
Trasischker, W. ; Lassnig, A. ; Khatibi, G. ; Weiss, B. ; Nelhiebel, M. ; Pelzer, R.
Author_Institution :
Fac. of Phys., Univ. of Vienna, Vienna, Austria
Abstract :
A novel accelerated mechanical fatigue testing system in combination with a special set-up was used to evaluate the reliability of Cu-ball bonds. Tailor made test structures were designed and prepared out of commercial wire bonded devices to assess bonding strength of the interconnects under various modes of cyclic loading. Fracture surface analysis of the interconnects showed wire bond lift-off as the dominant failure mode. Based on experimental results and FEM simulations, lifetime prediction curves for two different types of ball bonded devices could be established.
Keywords :
bonding processes; semiconductor device metallisation; tape automated bonding; accelerated mechanical fatigue testing system; aluminum metallization pads; bonding strength; cyclic loading; fracture surface analysis; lifetime prediction curves; thermosonic copper ball bonds; wire bonded devices; Copper; Fatigue; Loading; Metallization; Stress; Testing; Wires;
Conference_Titel :
Interconnect Technology Conference and 2011 Materials for Advanced Metallization (IITC/MAM), 2011 IEEE International
Conference_Location :
Dresden
Print_ISBN :
978-1-4577-0503-8
DOI :
10.1109/IITC.2011.5940359