• DocumentCode
    2010925
  • Title

    Lifetime of thermosonic copper ball bonds on aluminum metallization pads

  • Author

    Trasischker, W. ; Lassnig, A. ; Khatibi, G. ; Weiss, B. ; Nelhiebel, M. ; Pelzer, R.

  • Author_Institution
    Fac. of Phys., Univ. of Vienna, Vienna, Austria
  • fYear
    2011
  • fDate
    8-12 May 2011
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    A novel accelerated mechanical fatigue testing system in combination with a special set-up was used to evaluate the reliability of Cu-ball bonds. Tailor made test structures were designed and prepared out of commercial wire bonded devices to assess bonding strength of the interconnects under various modes of cyclic loading. Fracture surface analysis of the interconnects showed wire bond lift-off as the dominant failure mode. Based on experimental results and FEM simulations, lifetime prediction curves for two different types of ball bonded devices could be established.
  • Keywords
    bonding processes; semiconductor device metallisation; tape automated bonding; accelerated mechanical fatigue testing system; aluminum metallization pads; bonding strength; cyclic loading; fracture surface analysis; lifetime prediction curves; thermosonic copper ball bonds; wire bonded devices; Copper; Fatigue; Loading; Metallization; Stress; Testing; Wires;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Interconnect Technology Conference and 2011 Materials for Advanced Metallization (IITC/MAM), 2011 IEEE International
  • Conference_Location
    Dresden
  • ISSN
    pending
  • Print_ISBN
    978-1-4577-0503-8
  • Type

    conf

  • DOI
    10.1109/IITC.2011.5940359
  • Filename
    5940359