DocumentCode
2010925
Title
Lifetime of thermosonic copper ball bonds on aluminum metallization pads
Author
Trasischker, W. ; Lassnig, A. ; Khatibi, G. ; Weiss, B. ; Nelhiebel, M. ; Pelzer, R.
Author_Institution
Fac. of Phys., Univ. of Vienna, Vienna, Austria
fYear
2011
fDate
8-12 May 2011
Firstpage
1
Lastpage
3
Abstract
A novel accelerated mechanical fatigue testing system in combination with a special set-up was used to evaluate the reliability of Cu-ball bonds. Tailor made test structures were designed and prepared out of commercial wire bonded devices to assess bonding strength of the interconnects under various modes of cyclic loading. Fracture surface analysis of the interconnects showed wire bond lift-off as the dominant failure mode. Based on experimental results and FEM simulations, lifetime prediction curves for two different types of ball bonded devices could be established.
Keywords
bonding processes; semiconductor device metallisation; tape automated bonding; accelerated mechanical fatigue testing system; aluminum metallization pads; bonding strength; cyclic loading; fracture surface analysis; lifetime prediction curves; thermosonic copper ball bonds; wire bonded devices; Copper; Fatigue; Loading; Metallization; Stress; Testing; Wires;
fLanguage
English
Publisher
ieee
Conference_Titel
Interconnect Technology Conference and 2011 Materials for Advanced Metallization (IITC/MAM), 2011 IEEE International
Conference_Location
Dresden
ISSN
pending
Print_ISBN
978-1-4577-0503-8
Type
conf
DOI
10.1109/IITC.2011.5940359
Filename
5940359
Link To Document