DocumentCode
2010977
Title
Laser initiation and radiofrequency sustainment of high pressure plasmas
Author
Akhtar, K. ; Scharer, J. ; Tysk, S. ; Denning, Mark
Author_Institution
Wisconsin Univ., Madison, WI, USA
fYear
2003
fDate
5-5 June 2003
Firstpage
148
Abstract
Summary form only given, as follows. We present results of 193 nm excimer laser pre-ionization of a low ionization potential seed gas in argon and air components at high pressures. The laser pre-ionization with 10 mTorr of tetrakis-dimethyl-amino-ethylene (TMAE) allows much lower RF powers to sustain the plasma discharge at densities in the 10/sup 12-13//cc range in argon and air components in the range of 10-760 Torr with radiofrequency (RF) powers in the 2-10 kW range.
Keywords
high-frequency discharges; high-pressure techniques; organic compounds; photoionisation; plasma production by laser; 10 mtorr; 10 to 760 torr; 193 nm; 2 to 10 kW; TMAE; excimer laser preionization; high pressure plasmas; laser initiation; potential seed gas; radiofrequency sustainment; tetrakis-dimethyl-amino-ethylene; Atmospheric-pressure plasmas; Cathodes; Gas lasers; Laser theory; Nitrogen; Plasma measurements; Plasma sources; Plasma stability; Plasma temperature; Radio frequency;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on
Conference_Location
Jeju, South Korea
ISSN
0730-9244
Print_ISBN
0-7803-7911-X
Type
conf
DOI
10.1109/PLASMA.2003.1228581
Filename
1228581
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