• DocumentCode
    2010979
  • Title

    Measurement of elastic tension of Parylene films deposited on liquid

  • Author

    Binh-Khiem, Nguyen ; Matsumoto, Kiyoshi ; Shimoyama, Isao

  • Author_Institution
    Univ. of Tokyo, Tokyo, Japan
  • fYear
    2010
  • fDate
    24-28 Jan. 2010
  • Firstpage
    556
  • Lastpage
    559
  • Abstract
    Parylene films deposited on liquid surface induce film tension that changes the liquid shape. We observed that the force acting on the surface of Parylene-C encapsulated liquid bodies increased continuously during Parylene deposition process and reached final values of magnitude more than 700 ¿N/mm for a 1 ¿m thick film, 20 times larger than the surface tension of the encapsulated liquid. This surface force can only be attributed to the tension of the Parylene films. This founding requires that in design of Parylene encapsulated liquid structures, Parylene film tension must be considered as the main factor that determines the structures´ final shape.
  • Keywords
    chemical vapour deposition; elasticity; liquid structure; polymers; thick films; Parylene deposition process; elastic tension; encapsulated liquid structures; liquid surface; parylene films; surface tension; Coatings; Crystallization; Equations; Gravity; Micromechanical devices; Polymers; Semiconductor films; Shape measurement; Surface tension; Thick films;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
  • Conference_Location
    Wanchai, Hong Kong
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-5761-8
  • Electronic_ISBN
    1084-6999
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2010.5442443
  • Filename
    5442443