DocumentCode
2010979
Title
Measurement of elastic tension of Parylene films deposited on liquid
Author
Binh-Khiem, Nguyen ; Matsumoto, Kiyoshi ; Shimoyama, Isao
Author_Institution
Univ. of Tokyo, Tokyo, Japan
fYear
2010
fDate
24-28 Jan. 2010
Firstpage
556
Lastpage
559
Abstract
Parylene films deposited on liquid surface induce film tension that changes the liquid shape. We observed that the force acting on the surface of Parylene-C encapsulated liquid bodies increased continuously during Parylene deposition process and reached final values of magnitude more than 700 ¿N/mm for a 1 ¿m thick film, 20 times larger than the surface tension of the encapsulated liquid. This surface force can only be attributed to the tension of the Parylene films. This founding requires that in design of Parylene encapsulated liquid structures, Parylene film tension must be considered as the main factor that determines the structures´ final shape.
Keywords
chemical vapour deposition; elasticity; liquid structure; polymers; thick films; Parylene deposition process; elastic tension; encapsulated liquid structures; liquid surface; parylene films; surface tension; Coatings; Crystallization; Equations; Gravity; Micromechanical devices; Polymers; Semiconductor films; Shape measurement; Surface tension; Thick films;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location
Wanchai, Hong Kong
ISSN
1084-6999
Print_ISBN
978-1-4244-5761-8
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2010.5442443
Filename
5442443
Link To Document