Measurement of electron energy distribution in an asymmetric capacitively coupled plasmas

Author

Kwak, G.Y. ; Ahn, J.S. ; Lee, Byoung-Kuk ; Choi, Young-Sik ; Chung, Ki-Seok

Author_Institution

Dept. of Nucl. Engineenng, Hanyang Univ., Seoul, South Korea

fYear

2003

fDate

5-5 June 2003

Firstpage

152

Abstract

Summary form only given, as follows. In a low-pressure capacitive coupled Argon RF Discharge at 13.56 MHz, the electron energy distribution function (EEDF) was measured with RF compensated probe. Measurements have been made in Argon ranging in gas pressure from 1 mTorr to 50 mTorr and in a power of 1.2 kW. Measurements also show the differences between RF compensated probe and uncompensated probe. With increasing gas pressure a transition from low temperature mode to high temperature mode was found.

Keywords

argon; high-frequency discharges; plasma density; plasma probes; 1 to 50 mtorr; 1.2 kW; 13.56 MHz; Ar; RF compensated probe; asymmetric capacitively coupled plasmas; electron energy distribution function; low-pressure RF discharge; temperature mode transition; Argon; Distribution functions; Electrons; Energy measurement; Plasma measurements; Plasma temperature; Power measurement; Pressure measurement; Probes; Radio frequency;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on

Conference_Location

Jeju, South Korea

ISSN

0730-9244

Print_ISBN

0-7803-7911-X

Type

conf

DOI

10.1109/PLASMA.2003.1228589

Filename

1228589