DocumentCode
2011273
Title
Selective-Polysilicon Emitter, Self-Aligned Bipolar Structure for BiCMOS VLSI Applications
Author
Shih Wei Sun ; Denning, D. ; Hayden, J. ; Woo, M. ; Fitch, J.
Author_Institution
Motorola Inc., Advanced Products Research and Development Laboratory, Texas
fYear
1991
fDate
28-30 May 1991
Firstpage
55
Lastpage
56
Keywords
BiCMOS integrated circuits; CMOS process; Etching; Hafnium; Implants; Rapid thermal annealing; Silicon; Substrates; Sun; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1991. Digest of Technical Papers., 1991 Symposium on
Conference_Location
Oiso, Japan
Type
conf
DOI
10.1109/VLSIT.1991.705987
Filename
705987
Link To Document