Title :
A new method for fluid simulation of high-density plasma discharge
Author :
Choe, Hyeonhyeong ; Kim, S.S. ; Yoon, N.S.
Author_Institution :
Samsung Electron. Co. Ltd, Gyeonggi, South Korea
Abstract :
Summary form only given, as follows. To overcome the time step limitation in fluid simulation of high-density plasma discharge, an unconditionally stable algorithm that is applicable to J/sub tot/(=J+[1/4/spl pi/][/spl part/E//spl part/t])=0 case is proposed [H. Choe et al., J. Comp. Phys. 170, 550 (2001)]. In this article, we extend the algorithm to J/sub tot//spl ne/0 case. To examine the effectiveness of new algorithm, we applied the new method to J/sub tot//spl ne/0 case. The results indicate that the newly developed algorithm successfully overcome the time step limitation.
Keywords :
discharges (electric); plasma simulation; fluid simulation; high-density plasma discharge; time step limitation; unconditionally stable algorithm; Argon; Fault location; Nuclear and plasma sciences; Plasma properties; Plasma simulation; Plasma sources; Sulfur hexafluoride; Tellurium;
Conference_Titel :
Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on
Conference_Location :
Jeju, South Korea
Print_ISBN :
0-7803-7911-X
DOI :
10.1109/PLASMA.2003.1228598