Title :
Force sensor based on metal nanoparticle
Author :
Koyama, Asuto ; Kan, Tetsuo ; Iwase, Eiji ; Matsumoto, Kiyoshi ; Shimoyama, Isao
Author_Institution :
Univ. of Tokyo, Tokyo, Japan
Abstract :
We propose a force sensor based on gold nanoparticles, which enable optical detection of force by measurement of the scattering light spectrum. Gold nanoparticles were dispersed on an elastomer sheet. The scattering spectrum changes due to strain were observed to investigate applicability of the sensor to force measurement. The force deforms the elastomer sensor body, and increases the interparticle distance of gold nanoparticles on the sheet. The increase of the interparticle distance gives rise to the scattering characteristic changes. We fabricated a prototype sensor using PDMS sheet and 40 nm of diameter gold nanoparticles. It was demonstrated that 21% strain induced 60% increase of scattering intensity of gold nanoparticles.
Keywords :
biological techniques; biological tissues; elastomers; force sensors; gold; light scattering; microsensors; nanoparticles; Au; PDMS; elastomer sensor; elastomer sheet; force measurement; force sensor; interparticle distance; metal nanoparticle; optical detection; scattering light spectra; size 40 nm; Capacitive sensors; Force measurement; Force sensors; Gold; Light scattering; Nanoparticles; Optical detectors; Optical scattering; Optical sensors; Sensor phenomena and characterization;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2010.5442475