Polycarbosilane-derived silicon carbide MEMS component fabricated by slip casting with SU8 micro mold

In this paper, we describe a new production method for microscale silicon carbide (SiC) ceramics parts. Slip casting with SU8 micro mold was carried out for the fabrication of a three-dimensional SiC MEMS component, which was made from polycarbosilane (PCS) precursor-derived SiC nano powder. SiC nano powder was mixed with a PCS solution. The slips were then cast into SU8 micro mold made on porous tungsten carbide (WC) plate. Firing at 1273 K was conducted for SU8 evaporation and PCS pyrolysis. We have succeeded in producing microscale SiC ceramics gears using the ¿¿ slip casting¿ technique.