Parylene stiction

Author

Yu, Feiqiao ; Lin, Jeffrey Chun-Hui ; Chen, Po-Jui ; Tai, Yu-Chong

Author_Institution

California Inst. of Technol., Pasadena, CA, USA

fYear

2010

fDate

24-28 Jan. 2010

Firstpage

408

Lastpage

411

Abstract

This paper presents a preliminary study into stiction between parylene C and substrate surfaces for biocompatible check-valve applications. During fabrication, parylene C is used as the structural material for the check-valve. The substrate surfaces studied include Au, Al, Si, parylene C, XeF₂ treated Si, and silicon dioxide. Stiction between different surfaces is created after sacrificial photoresist etching. Then, the stiction is measured using blister tests, and stiction mechanisms for different materials are investigated. The devices are released with different recipes to examine their effects. Finally, the results of the study reveal methods to control the cracking pressure of parylene check-valves.

Keywords

aluminium; etching; gold; polymers; pyrolysis; silicon; silicon compounds; stiction; Al; Au; Parylene check-valves; Si; SiO₂; XeF₂-Si; biocompatible check-valve applications; blister tests; cracking pressure; parylene C; sacrificial photoresist etching; silicon dioxide; stiction mechanisms; structural material; substrate surfaces; Biological materials; Etching; Fabrication; Gold; Materials testing; Pressure control; Resists; Silicon compounds; Surface cracks; Surface treatment;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on

Conference_Location

Wanchai, Hong Kong

ISSN

1084-6999

Print_ISBN

978-1-4244-5761-8

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2010.5442478

Filename

5442478