DocumentCode
2011915
Title
Perspectives On MOS Directions
Author
Marr, George
Author_Institution
Maruman Integrated Circuits, Inc,
fYear
1977
fDate
6-9 Sep 1977
Firstpage
242
Lastpage
244
Keywords
Costs; Doping; Dry etching; Integrated circuit technology; Large scale integration; Logic circuits; MOS devices; Plasma temperature; Virtual manufacturing; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
COMPCON Fall '77
Type
conf
DOI
10.1109/CMPCON.1977.680835
Filename
680835
Link To Document